標題: 關於cell-based 流程的DRC問題 [打印本頁] 作者: ywchywch 時間: 2008-3-7 02:22 PM 標題: 關於cell-based 流程的DRC問題 請問各位大大$ B/ j5 n Y# j1 m2 m8 V
我用TSMC18的design kit作cell-based layout的練習，軟體是用encounter，大部分的步驟是依照CIC所提供的Lab去做，完成之後用我的GDS檔去做DRC，會出現下列的DRC ERROR，而且是M1~M5、via1~via5都會有這方面的error，因為error的數目頗大，不太可能用人工去debug，所以我想請問有經驗的大大們，能不能告訴我最大的問題點在哪裡？以及這些錯誤代表什麼？要如何debug比較適合？ # b4 S& |7 {+ h' Z& `) M: A( U$ d( g" i
先謝謝各位大大了!!感激不盡!! , a) @6 v, f/ U8 V# G! P& {. y3 c/ t; D! ?
1. M2.W.1 { @ M2 width < 0.28( q! \. K4 f5 I+ J( E4 Q
INT M2 < 0.28 SINGULAR REGION ABUT < 90 8 u) i/ O! f% H y# {} # ^* n7 z, u1 E" u- u6 A 5 s' A M* F7 B7 K, l% y2. M2.S.1 { @ M2 spacing < 0.28" m% i7 H G9 a% f/ {
EXT M2 < 0.28 ABUT < 90 SINGULAR REGION6 Q, O0 _" l3 @5 H# D6 A
}4 Q, H- Z+ D; h8 }$ W+ B
# D( f" W7 ?& g0 p3. M2.S.2 { @ Wide M2 (>10um) min. to M2 < 0.6 um : o2 |, P; d' T- ^$ b+ ]1 S M2_S5 = SHRINK (SHRINK (SHRINK (SHRINK M2 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5 1 y6 }7 ~. {$ x# \5 y' m5 D. q M2_G5 = GROW (GROW (GROW (GROW M2_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5 4 r" o7 I; H3 L' t- s# z M2_Wide = M2_G5 AND M2 6 `4 Z1 X) ]/ m# U1 N# A/ o3 ~2 p
M2_Exp = SIZE M2_Wide BY 1 INSIDE OF M2 STEP 0.196 % x2 f, ^$ ]% D M2_Branch = M2_Exp NOT M2_Wide, h1 `" ~4 b0 h' E
M2_Branch_edge = M2_Branch COIN INSIDE EDGE M2 e) P: V# e- C8 c
M2_Check = M2 AND (SIZE M2_Exp BY 0.6)- m5 f( y- z* C; a; v. x; X
M2_Else = M2_Check NOT INTERACT M2_Exp 0 H- {) W$ s: `' O! M/ Y M2_Extend = M2_Check NOT M2_Exp ( K4 o$ l7 }. ?( G: {
* ~# ?; u3 G8 D$ Q0 F' c3 D EXT M2_Wide M2_Else < 0.6 ABUT >0 <89.5 REGION+ |( _0 u) x/ T) j( j1 m- L% ~5 ?
EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 OPPOSITE REGION 8 Q$ `- d# F9 d3 z/ P EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 CORNER REGION ! D+ p, U8 Q5 }8 _ { EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 PROJ==0 REGION' _0 Z" B2 G* d; r# `
A = EXT M2_Exp < 0.6 ABUT > 0 < 89.5 SPACE REGION 1 e" V2 k; ^% Z: ? A NOT INTERACT M2_Extend% O* h/ m# ]2 [
}3 M* V# M9 D3 n9 J. \, M3 ?: l
4. M2.E.1 { @ Min extension of a M2 region beyond a VIA1 region is 0.01 um 2 {" k0 H5 n6 H+ w ENC VIA1 M2 < 0.01 ABUT<90 SINGULAR ; R1 @) h# @* H/ w2 z" n
VIA1 NOT M2 , l( V- i& G0 Y2 _5 A
} 5 H+ D. s8 P* a* m) ~- D , r5 Q ~( p, K# k5. M2.E.2 { @ Min extension of M2 end-of-line region beyond VIA1 region is 0.06um" Z, ?/ }. s. F7 p g( M& [
X = ENC [VIA1] M2 < 0.06 ABUT < 90 OPPOSITE // a narrow side 3 T1 M; H4 \* _% x( X+ F! l! w% N INT X < 0.26 ABUT == 90 INTERSECTING ONLY // adjacent narrow sides& l* L. D O' P' `9 J5 G2 {
}: F3 v9 w, ~5 m% M( }
5 i& D; X2 V& Y9 `" i
6. M2.A.1{ @ Min M2 area region < 0.202: W L3 i5 ]; D, u5 u/ W0 i
AREA M2 < 0.202 / r0 y1 S0 E# {) e}' L: b4 M9 H& ~
// Density check M2.R.1 included at the end of this file / ~% e8 H) j# @: K: ^// VIA2 checks ( k% W, u2 z+ \# R//============= 2 f5 \$ M& a3 P6 C2 n3 B 7 e2 S; B/ y1 U& Y1 v g2 f7. VIA2.W.1 { @ VIA2 must be 0.26 x 0.26 um 5 s1 y* }2 Q$ v5 G% y; A A = NOT RECTANGLE VIA2 == 0.26 BY == 0.26 ORTHOGONAL ONLY ; k; r: L# A/ r A OUTSIDE RNGX // exclude from metal fuse protection ring area 7 D5 W6 @/ F: R) c} 4 |0 H0 t/ `8 H7 n) m* A1 m& e6 c2 b+ K5 V n# ]" Y5 ]; W
8. VIA2.S.1 { @ VIA2 SPACING < 0.262 Q& F5 ?- y+ w! a2 J
EXT VIA2 < 0.26 ABUT < 90 SINGULAR REGION 0 ^. k0 Z N' v8 L: z
}! x+ x2 ^8 H- F- U7 O" \4 W' Z
+ t& ^. v& ~" }5 [9. VIA2.E.1 { @ Min extension of a M2 region beyond a VIA2 region is 0.01 um 5 c4 K" z) b5 a$ z, V4 h2 M ENC VIA2 M2 < 0.01 ABUT<90 SINGULAR 2 g! a& ~2 [" H# A3 B) b
VIA2 NOT M2 4 y) [% A( S% r' D
}# a7 |" [: p1 w$ p% i( A
$ L3 @" T( u8 f1 n10. VIA2.E.2 { @ Min extension of M2 end-of-line region beyond VIA2 region is 0.06 um * q, M( g; E8 b4 @ X = ENC [VIA2] M2 < 0.06 ABUT < 90 OPPOSITE // a narrow side 4 C, J0 K" D7 O8 m3 R1 x. ]+ X( } INT X < 0.26 ABUT == 90 INTERSECTING ONLY // adjacent narrow sides 1 i/ }7 A, W( @& z" [/ y4 c9 q- Q7 M}作者: motofatfat 時間: 2008-3-7 02:30 PM
我猜你試用APR軟體RUN出來ㄉ & l- r4 S( Q, N# G' V1 {/ L應該是相同NET ㄉMetal space 和 via extension w' t% K( y( J$ E7 f3 l1 p不夠的問題,通常會用 skill file 來修正作者: michael6172 時間: 2008-3-7 02:51 PM
我覺得你打電話去CIC問工程師會比較快吧 ...
