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標題: 關於cell-based 流程的DRC問題 [打印本頁]

作者: ywchywch    時間: 2008-3-7 02:22 PM
標題: 關於cell-based 流程的DRC問題
請問各位大大( m7 U4 w5 q+ c% n( V. e3 u5 n
我用TSMC18的design kit作cell-based layout的練習,軟體是用encounter,大部分的步驟是依照CIC所提供的Lab去做,完成之後用我的GDS檔去做DRC,會出現下列的DRC ERROR,而且是M1~M5、via1~via5都會有這方面的error,因為error的數目頗大,不太可能用人工去debug,所以我想請問有經驗的大大們,能不能告訴我最大的問題點在哪裡?以及這些錯誤代表什麼?要如何debug比較適合?+ l/ p( O5 a% {6 ?

9 n. ]4 o% D7 j3 [! ?% I先謝謝各位大大了!!感激不盡!!
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" A% j9 l& z' u) h* W1. M2.W.1 { @ M2 width < 0.28
  I* V8 c) M/ U: d) u" b  INT M2 < 0.28 SINGULAR REGION ABUT < 90- g" G$ X$ j9 I8 ]; y
}; b  v! h/ q' Y' g9 I* u% g! w

6 ^' V7 ~- b& k& y; c5 ~: X9 S& w2. M2.S.1 { @ M2 spacing < 0.28
& Y& d& \7 e$ ]# L( c  EXT M2 < 0.28 ABUT < 90 SINGULAR REGION
2 M* Q0 o1 n# ^1 O# S: p" S$ J}  m( f- t1 @4 F* a% X8 P: |
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3. M2.S.2 { @ Wide M2 (>10um) min. to M2 < 0.6 um
& D/ _9 z& r# L, t$ Y* U  M2_S5 = SHRINK (SHRINK (SHRINK (SHRINK M2 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5" ^1 m2 m) x5 |
  M2_G5 = GROW (GROW (GROW (GROW M2_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5& u1 M3 u* L8 s- A3 T. Y
  M2_Wide = M2_G5 AND M2$ [+ p$ b2 |( l& g: g
6 O7 s) d* c3 N6 C) R
  M2_Exp = SIZE M2_Wide BY 1 INSIDE OF M2 STEP 0.1968 m% B7 F! g+ Z) a/ s! _& ~
  M2_Branch = M2_Exp NOT M2_Wide- o( [% L4 o) F  D
  M2_Branch_edge = M2_Branch COIN INSIDE EDGE M2
6 z) I  A6 J% @7 l  M2_Check = M2 AND (SIZE M2_Exp BY 0.6)8 x! F) k0 P3 ^: t) U# s4 g
  M2_Else = M2_Check NOT INTERACT M2_Exp4 m; H% P2 F$ u# A
  M2_Extend = M2_Check NOT M2_Exp 5 G; B( g8 G# A2 D4 ?/ i; n! P: v
' c% l0 n4 V+ V, A
  EXT M2_Wide M2_Else < 0.6 ABUT >0 <89.5 REGION
, g7 C5 T$ }( K  y; b  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 OPPOSITE REGION, d' p! y& b8 ?& v
  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 CORNER REGION
- L% f! Q% W3 i/ ~, v. n" V% I  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 PROJ==0 REGION' e$ ^; l2 m1 [& ]/ T5 C8 I
  A = EXT M2_Exp < 0.6 ABUT > 0 < 89.5 SPACE REGION
  H4 g' S( m+ |5 w) W* _2 F- ~( g- n  A NOT INTERACT M2_Extend
4 y+ E7 p6 u0 m* ~# o}6 a. ~7 e+ _* l- C0 k
4. M2.E.1 { @ Min extension of a M2 region beyond a VIA1 region is 0.01 um
) J5 ?8 D  n% J, T8 ?   ENC VIA1 M2 < 0.01 ABUT<90 SINGULAR
. N* |: w% f: C0 ?  p3 U1 {3 _   VIA1 NOT M2   
+ F" B  F5 v9 g3 j6 o& q5 p5 q. R}
$ \/ B/ I! I( s
; o- L% G5 V7 l! _. _5. M2.E.2 { @ Min extension of M2 end-of-line region beyond VIA1 region is 0.06um; g8 n! r; Y; r9 G+ u
   X = ENC [VIA1] M2 < 0.06 ABUT < 90 OPPOSITE                // a narrow side, h' h4 [! ~! V" @$ l$ R
   INT X < 0.26 ABUT == 90 INTERSECTING ONLY       // adjacent narrow sides
8 e4 \" C" @% l4 @. f}
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5 {5 @  C, b8 G$ h6. M2.A.1{ @ Min M2 area region < 0.202: z3 e; ]8 U- \8 R8 F
  AREA M2 < 0.202& k+ r% _) ^9 x) C, R8 K
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// Density check M2.R.1 included at the end of this file4 u7 ^2 y* h& `
// VIA2 checks- U6 J6 o5 D% P) c: a9 e+ h
//=============# l) ]' Q/ A/ G1 O; C+ {, e
- Z+ p% ^/ {& c0 K
7. VIA2.W.1 { @ VIA2 must be 0.26 x 0.26 um
* H+ |( i# u  J' e) g  A = NOT RECTANGLE VIA2 == 0.26 BY == 0.26 ORTHOGONAL ONLY
7 g3 T( {# M$ l2 s. n7 r( D( E  A OUTSIDE RNGX   // exclude from metal fuse protection ring area7 M7 Z% L7 Y$ [& U
}3 n  z; j" t# p! Y) g

$ S) Q! ~% B! n8. VIA2.S.1 { @ VIA2 SPACING < 0.26
9 x. G& G) R5 m# G7 R  EXT VIA2 < 0.26 ABUT < 90 SINGULAR REGION 7 K$ a3 m6 _1 D% r  T# H! a
}4 Z' I# s5 t& d9 B# q. O

4 I9 u/ X4 e, c# r$ F- A2 F! x9. VIA2.E.1 { @ Min extension of a M2 region beyond a VIA2 region is 0.01 um7 b4 t, r1 \# a
  ENC VIA2 M2 < 0.01 ABUT<90 SINGULAR
2 d6 B; S( {6 s( z3 @: r* h  VIA2 NOT M2    2 }; \" X/ o: g9 J4 v5 C# x+ r2 m
}& Z( X% f( {$ C+ D

) v" Q9 A0 u  Y! M10. VIA2.E.2 { @ Min extension of M2 end-of-line region beyond VIA2 region is 0.06 um
$ G) z% |- V6 N  H# B. ~3 v5 a( O   X = ENC [VIA2] M2 < 0.06 ABUT < 90 OPPOSITE         // a narrow side" Y6 k2 B8 h# N. @, x6 q3 T8 I
   INT X < 0.26  ABUT == 90 INTERSECTING ONLY     // adjacent narrow sides
9 {3 i& i: X2 J+ U2 D) V}
作者: motofatfat    時間: 2008-3-7 02:30 PM
我猜你試用APR軟體RUN出來ㄉ+ n4 d: {: w( m7 M) e, F) H
應該是相同NET ㄉMetal space 和 via extension ) T4 ^' m. C4 @8 Y. r$ W1 p
不夠的問題,通常會用 skill file 來修正
作者: michael6172    時間: 2008-3-7 02:51 PM
我覺得你打電話去CIC問工程師會比較快吧 ...




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