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用drc report上的坐標來找error9 T, x2 z3 O/ m s" c. W) \/ V4 d
卻發現error是在corner LL之中
6 Z! c! w* j6 g' o如附件圖 970926-1.jpg及970926-2.jpg% K: Q' r. h" S4 }, v5 P1 v
(兩張圖上的2個小白點即是問題所在)1 p$ s4 r m( C6 n" r
這是在corner LL之中請問這該如何處理呢?
# u! a( l6 b6 }* C- }$ w將calibre drc嵌入astro中,點error坐標也是顯示在 corner LL
( i2 z( Z; h1 g3 A. H% |/ y0 z已確認過了corner LL沒有任何的線及cell放置。. m* q8 z, @0 t
請各位大大幫幫忙,小弟先在這邊謝謝各位前輩了
2 o; D/ U% y( E9 F/ J) ^9 _坐標及error message 如下:
, w2 u' V# C! e0 v8 CM5.W.1
+ `9 u2 _" T) ^6 z8 8 3 May 12 17:34:49 2009
8 z/ q, \# I. s* GM5.W.1 { @ M5 width < 0.28# V8 f6 z$ s5 p# s
INT M5 < 0.28 SINGULAR REGION ABUT < 90" d4 P& \% ~$ S8 g$ r% C3 x
}- [/ |4 I/ ~- \; ~
p 1 3
8 E# v* i3 s. G8 d205180 2350004 F* c# `7 p+ Q+ |: q" F# p3 P
205460 234720
8 j* _# F4 w6 m4 S: `/ c3 c6 E205576 235000
, Z, i) ?! F4 p O( c" P0 [p 2 3 {$ f/ @( a% f6 N% X/ c
207720 235000
) q) j4 c* @" B208000 234720
0 W* [% ?! f9 T208116 235000
0 m, z, S' p, k8 Xp 3 3/ m% r: D( U" W
217525 2350001 c. S7 F$ I! u$ u- E5 F/ t7 Z
217805 234720
7 T% A5 c: Z( z6 ^( T1 H( Q# B! Z4 |& v217921 235000
2 }/ I* E& E8 m. E* z) ~) gp 4 31 i, O9 H& K4 e$ W) U
226625 235000
' n, ]# B" s* j2 ]7 R7 ] I226905 234720$ M; t4 i% g _9 ^
227021 2350004 ?8 n4 \' {% \% K
p 5 3
" h k/ }6 s1 y9 p. e- A234720 205460% j, l$ P5 p. _0 l" l1 P* X; i
235000 2051802 D, M. k& G& u
235000 205576& B0 }6 N/ W# @/ Z) A
p 6 3
2 A0 }# }( r2 _* B) H234720 208000
" o2 b d6 a# N: W/ F5 q235000 207720
; r/ e0 q7 S1 M. D0 s+ Z235000 208116
% S$ K9 @" E% G& s, x) qp 7 3
+ k5 e: g( N8 d \7 l% z! ^234720 217805
2 j! S( T2 i7 ~7 j3 p( p235000 217525
7 I+ T E7 q6 k4 c* V: f' R0 N) M235000 217921
4 [$ d& `& [ l3 ?/ \! A. D0 Fp 8 3$ \7 I! T8 ~$ a) [
234720 226905
; O( }3 a2 Y9 G# z7 I- r235000 2266256 o7 y, D6 ^' \8 [6 k
235000 227021, A+ E! _# \( e: |3 u& h, A9 Y
M4.W.1
7 W( N% d. \$ G8 8 3 May 12 17:34:41 2009
5 \6 R% s' G. r- J2 T$ HM4.W.1 { @ M4 width < 0.28) K" b& p K x' f; c2 ^7 @
INT M4 < 0.28 SINGULAR REGION ABUT < 90' @: R4 U' L" |. i9 O1 k9 j
}
& Z# ~3 V' f+ M* E- C5 z+ vp 1 3
, }( o- g7 b b o; J# C1 [7 h205180 235000
" u3 \3 d) _* L205460 2347200 L$ B: g- M! r
205576 235000
' m2 \( w) c6 b# j* ep 2 3
; K" E+ T9 K7 q* U# o/ d" p2 o9 c6 H) ?207720 235000
: @7 P( p5 V1 O% T2 N; C208000 234720" I0 F% i$ n a
208116 2350000 j! Y- ?, |1 a6 N+ X$ H# J
p 3 3
. s2 i( s) T5 V# O B3 ]: y0 B217525 235000' |& g: I! i l* U' N
217805 234720
5 X+ P7 l: J5 o! q6 P( j+ G217921 235000
* f1 Q; Y* J/ B0 |& ]p 4 3
8 I( ?2 y. q, M4 n( H226625 2350003 C" [* C& P' v1 T+ w
226905 234720
6 `7 ~5 {; O# l @' m, `6 A$ |227021 2350002 n% d4 ?4 x4 X
p 5 3* ~! p+ ]: l. {% {* }
234720 205460. L$ K3 w D4 ~ ]; L
235000 2051807 @ x! K: w% {6 d4 i! I4 F
235000 205576
' m% f# \0 e1 t# y5 h) `% y: cp 6 3+ H. X0 T: U& w" \+ o" {4 Q4 m
234720 208000
$ |3 } F5 [* l' \9 V+ x0 _2 n235000 2077203 m" S4 S) m5 A# s; I: E
235000 208116
`* J$ L& G ?0 S4 n1 k4 bp 7 3) m/ q2 f E3 ~. j2 P
234720 2178051 c6 G% L1 w3 H: ^8 @. ~
235000 217525; S' V( B9 o, g
235000 217921- X0 V& T; a% Y
p 8 3
3 x4 M/ E/ e; t( ^" k! x( w, p234720 226905
+ p0 O7 B' A6 w4 J235000 2266258 o9 ]5 `9 I% j& D) t/ V6 U
235000 227021
2 a3 o# X! f( s" I$ z4 ?$ \; M7 I! M$ Y4 V! D2 d* M+ x5 X$ u
M3.W.17 r C. L# C. a0 t% y7 w
8 8 3 May 12 17:34:15 2009 2 j: n6 Q6 a" E5 u7 w+ y* W/ I
M3.W.1 { @ M3 width < 0.28
# m! T: F# }3 c* n INT M3 < 0.28 SINGULAR REGION ABUT < 902 b8 j; z) n: X# X3 z
}3 N/ p3 E R9 w( d
p 1 3
/ |( D( U$ d4 U* o, \% ^6 {205180 235000* n1 k7 K0 U$ |/ p& m* _
205460 234720
* d- D2 s8 ]2 b0 f0 M+ q( O+ q205576 2350009 q% S6 Q. K7 z
p 2 3
/ h4 N1 H: n# V L* F( b207720 235000
2 _- u* J7 D; s4 g( d6 d208000 234720' b1 P( o- H* D- b! |6 ?
208116 235000
' a6 ^( ^( O/ |$ d9 ^p 3 3 a. W7 A9 S8 Z, ]4 }
217525 2350008 Z4 A2 x7 X2 u( j
217805 2347208 Y1 g( @6 V {1 f5 f( g1 |$ A
217921 235000
6 M$ c& c) i+ `2 k; yp 4 3& D: W" {3 ]2 Y3 C& i
226625 235000; y7 H9 R1 ^$ g
226905 234720
% j" [. `* t1 E227021 2350005 @1 B' P5 m. V6 @% T- ?8 ~1 U8 I
p 5 36 ?5 P" D6 p5 r
234720 205460
$ V' P; c& N; p3 N, F: {235000 205180
6 L& r, k% r3 H- M6 F235000 205576
; }9 p( I3 v: v5 Fp 6 3% Q# t W2 v5 E$ P# ?/ j
234720 208000
& B3 A4 ?. B. G( a8 }+ f1 V z; E235000 207720- n/ \& n, n5 e& G) ]7 p& j7 S
235000 208116
3 c6 G( N9 ^. G8 }3 Vp 7 3
8 `7 z# e: N3 L3 }5 k* l! X/ B234720 217805
- L w! k3 T8 r n8 |7 Y235000 217525! p& b) j1 @, N# B6 p. C
235000 217921# U8 [7 k" v7 G! q4 X
p 8 3
3 w) V% ?' Z9 g$ S: _234720 226905
3 b; Q. T9 I# i; g% O& O3 K$ B235000 226625
: ~ ~2 K1 R2 p7 d235000 227021 |
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